TiO 2 thin film patterns prepared by chemical vapor deposition and atomic layer deposition using an atmospheric pressure microplasma printer
نویسندگان
چکیده
منابع مشابه
Atomic Layer Deposition of TiO
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ژورنال
عنوان ژورنال: Plasma Processes and Polymers
سال: 2019
ISSN: 1612-8850,1612-8869
DOI: 10.1002/ppap.201900127